| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double-sided polishing machine capable of maintaining sizing accuracy over a long tme without being substantially affected by a slow thickness change of polishing cloth, and its sizing controlling method. <P>SOLUTION: In this polishing machine, polishing is finished based on polishing time as for polishing of a workpiece of the first time, polishing is finished based on a measured value of a distance by a distance sensor 22 as for polishing of the workpiece of the second time and succeeding times, and the measured value of the distance sensor 22 is corrected based on an actually measured value of finished thickness of the workpiece and a target value of the finished thickness of the workpiece after finishing polishing of each time including the first time. Since the correction is performed for each time of the polishing, the sizing accuracy can be maintained over a long time. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
