摘要 |
PROBLEM TO BE SOLVED: To provide a substrate housing cassette preventing housed color filter substrates from being damaged and the generation of foreign matter in the inside of the housing cassette by preventing rubbing between a pattern forming surface and the inside of the housing cassette. SOLUTION: Mound-shaped groove parts 11 each formed into a shape having a mound base-like inclined surface 51 from the top of the inside of a housing cassette 10 toward a bottom 23 of a side wall 22 side are provided on the side surface opposing a pattern forming surface 40 including a mark or the like formed on one surface of a substrate 20, and the color filter substrate 20 is placed on the parts 11. COPYRIGHT: (C)2006,JPO&NCIPI |