| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for an inkjet head wherein diaphragms can be thermocompression bonded or bonded while deformation of the diaphragms is prevented when the inkjet head is formed, and to provide an inkjet head manufactured by the method. SOLUTION: The manufacturing method includes a pressing process, a sealing process and a thermocompression bonding process. In the pressing process, the diaphragms 4 and 4 are positioned so as to cover openings of an ink passage 205 of an up-down direction at a side face of a laminated member 2, thereby constituting a laminate, and then the laminate is pressed. In the sealing process, an ink feeding hole 2a and ink discharge holes 3a formed in the laminated member 2 are sealed. In the thermocompression bonding process, while the laminate is pressed and also the ink feeding hole 2a and the ink discharge holes 3a are sealed to keep the ink passage in a seal state, the diaphragms 4 and 4 are thermocompression bonded to the laminated member 2. Diffusion bonding can be carried out while the deformation of the diaphragms 4 and 4 is prevented. COPYRIGHT: (C)2006,JPO&NCIPI
|
