发明名称 |
Film-bulk acoustic wave resonator with motion plate |
摘要 |
An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
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申请公布号 |
US2006197411(A1) |
申请公布日期 |
2006.09.07 |
申请号 |
US20050073345 |
申请日期 |
2005.03.04 |
申请人 |
HOEN STORRS T;UNKRICH MARK A;TRUTNA WILLIAM R;LARSON JOHN D III;RUBY RICHARD C;FLOWER GRAHAM M;GROT ANNETTE |
发明人 |
HOEN STORRS T.;UNKRICH MARK A.;TRUTNA WILLIAM R.;LARSON JOHN D.III;RUBY RICHARD C.;FLOWER GRAHAM M.;GROT ANNETTE |
分类号 |
H01L41/04 |
主分类号 |
H01L41/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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