| 摘要 |
PROBLEM TO BE SOLVED: To provide a calibration device for a probe for accurately measuring the temperature of a substrate in a substrate treatment chamber. SOLUTION: This probe 40 includes a light guide body 42, one end of which is inserted in a processing chamber. The other end of the light guide body is coupled to a bifurcated optical fiber 46. A light source 54 is optically coupled to one branch of the optical fiber, and a pyrometer 56 is optically coupled to another branch. In order to self-calibrate the probe, an object 80 of stable reflectivity, e.g. a gold-plated wafer, is inserted into the chamber, the light source is activated, and the intensity of light reflected from the object is measured by the pyrometer. COPYRIGHT: (C)2006,JPO&NCIPI
|
