| 摘要 |
PROBLEM TO BE SOLVED: To avoid coating failure, improve the quality of products coated with coating liquids, and improve productivity. SOLUTION: A nozzle device 9 is provided with a manifold part 52 for storing a coating liquid, a discharge opening 53 that opens from the inside to the outside of the manifold part, and a coating liquid supply port 54 for supplying a coating liquid to the manifold part, wherein the angle between the opening direction of the discharge opening and the opening direction of the liquid supply port is within the range of 90°to 180°. COPYRIGHT: (C)2006,JPO&NCIPI
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