| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining method for cutting a workpiece to be machined having various lamination structures with high accuracy. <P>SOLUTION: The laser beam machining method comprises a step of forming a modified area 7 inside a substrate 15 by irradiating laser beams with the condensing point focused inside the substrate 15 in a workpiece 1 having a plurality of substrates 15, 17 joined to each other so as to have a space therebetween, forming a modified area 7 inside the substrate 17 by irradiating laser beams with the condensing point focused inside the substrate 17, and forming a cutting start area on the inner side by a predetermined distance from a laser beam incident surface 3 of the workpiece 1 along the cut schedule line of the workpiece 1 by these modified area 7, and a step of obtaining a plurality of functional elements having a plurality of substrates joined to each other so as to have a space therebetween by cutting the workpiece 1 along the cut schedule line with the cut starting area as a cutting start point by applying stresses to the workpiece 1. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
