| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet processing apparatus inexpensively manufacturable, reducing environmental load, reducing electric damage of a treating object, and improving processing capacity. SOLUTION: This wet processing apparatus 20 includes a nozzle 22 having a slit-like discharge port 38. The nozzle 22 is provided with a radical forming part 37 radically activating processing liquid. The radical forming part 37 comprises a first electrode 39 constituting a discharge port 38, a second electrode 40 provided as a counter electrode of the first electrode 39, and a sheet-like solid electrolyte 41 contacting the first and second electrodes 39, 40, disposed in a space 36 in the nozzle 22 to come into contact with the treated liquid discharged from the discharge port 38. COPYRIGHT: (C)2006,JPO&NCIPI
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