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发明名称
Photoresistzusammensetzungen, die Copolymere als Bindemittel enthalten
摘要
申请公布号
DE69736374(D1)
申请公布日期
2006.09.07
申请号
DE19976036374
申请日期
1997.05.28
申请人
SHIPLEY CO., L.L.C.
发明人
BARCLAY, GEORGE G.;CRONIN, MICHAEL F.;DELLAGUARDIA, RONALD A.;THACKERAY, JAMES W.;ITO, HIROSHI;BREYTA, GREG
分类号
G03F7/039;C08F212/14;G03F7/004;G03F7/30;H01L21/027
主分类号
G03F7/039
代理机构
代理人
主权项
地址
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