| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for producing a purified fluorine-containing polymer, a pellicle using the fluorine-containing polymer in a pellicle membrane and an exposure processing method using the pellicle. <P>SOLUTION: The method for producing a purified fluorine-containing polymer comprises washing a fluorine-containing polymer (A) containing a monomer unit having a structure represented by formula (A) (X<SP>1</SP>, X<SP>2</SP>, X<SP>3</SP>, X<SP>4</SP>and X<SP>5</SP>are each independently a hydrogen atom, a fluorine atom, a 1-3C polyfluoroalkyl group and at least three of them are fluorine atoms) as a part of a structure with a poor solvent containing no functional group with polarity. The method for producing a purified fluorine-containing polymer containing a monomer unit represented by formula (II), for example, formed by cyclic polymerization of CF<SB>2</SB>=CFOCF<SB>2</SB>CF<SB>2</SB>CH=CF<SB>2</SB>is provided. The pellicle comprises a membrane of the fluorine-containing polymer. The exposure processing method comprises using the pellicle. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
