CONTACT PROBE AND INSPECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To reliably bring a contact probe into contact with a part to be measured, and to bring the contact probe into contact with electrodes on both surfaces of a substrate by an inspection apparatus of a simple structure. SOLUTION: The contact probe 1 is constituted by superposing contact probe components 2 and 2 made of a metal plate on each other. Each contact probe component 2 is provided with a long arm 5 extended in one direction; a base 4 continuous to the base end side of the arm 5 and fixed to a holder; and a contact part 6 having a contact edge 6a continuous to a tip end of the arm 5 into linear contact with the part to be measured approximately in parallel directions with the direction of extension of the arm 5. COPYRIGHT: (C)2006,JPO&NCIPI