发明名称 DOE LENS AND ILLUMINATION OPTICAL SYSTEM HAVING THE DOE LENS
摘要 PROBLEM TO BE SOLVED: To provide a DOE lens which can be used for illumination optical system or the like, can be easily manufactured and has a thin diffractive optical surface, and to provide an illumination optical system having the DOE lens. SOLUTION: The DOE lens 13 is provided with the diffractive optical surface Gf utilizing an aspherical shape, wherein the aspherical shape is decided based on hyperboloid and is designed with a super-high refractive index method. Therein, when m is the order number of diffraction,λis wavelength, K is conical coefficient and nu is virtual refractive index in the super-high refractive index method, the diffractive optical surface satisfies the expression 1, thereby manufacturing is easy. And, the illumination optical system 14 comprises a light source 11 and the DOE lens 13. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006235618(A) 申请公布日期 2006.09.07
申请号 JP20060020422 申请日期 2006.01.30
申请人 NIKON CORP 发明人 MUKAI KAORI
分类号 G02B5/18;G02B13/00;G02B13/18;G02B27/18;G03B21/14 主分类号 G02B5/18
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