| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate, a device, and a method for measuring carrier mobility, which can measure a semiconductor thin film along in-plane directions in a state similar to an actual usage, easily and accurately at a low cost. SOLUTION: The substrate 10 for measuring the carrier mobility comprises: a board 11 which transmits exciting light; a light blocking layer 12 which is formed on the board 11 and has an aperture 13 in its portion; a first electrode 14 which is disposed so as to be adjacent to the aperture 13 or to cover a portion of the aperture 13; and a second electrode 15 which is formed on the light blocking layer 12 and disposed at a prescribed spacing from the first electrode 14. In the case the light blocking layer 12 is conductive, it is preferable that an insulating layer 16 is disposed in order to prevent the light blocking layer 12 from coming into electric contact with the electrodes 14, 15. COPYRIGHT: (C)2006,JPO&NCIPI
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