| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate conveying device having a cylinder-driven type moving finger. SOLUTION: The substrate conveying device includes a robot arm portion whose operation is controlled by a driving means, a blade 120 which is provided atop of the robot arm portion and where a substrate W is placed, and a clamping member 130 which is provided to the blade 120 and fixes the substrate W while disposing the substrate W placed on the blade 120 in a regular position. COPYRIGHT: (C)2006,JPO&NCIPI |
