| 摘要 |
PROBLEM TO BE SOLVED: To provide a cutting device, capable of reducing consumption of cleaning water while maintaining cleaning performance in a cutting device provided with a cleaning water feed means to feed cleaning water to a workpiece in cutting the workpiece held on a chuck table. SOLUTION: This cutting device is provided with the chuck table to hold the workpiece, a cutting means provided with a cutting blade for cutting the workpiece held on the chuck table, and a cleaning water feed means to feed the cleaning water to the workpiece held on the chuck table. The cleaning water feed means is provided with a cleaning water nozzle means provided with at least three nozzles to jet cleaning water toward the workpiece held on the chuck table, and a flow regulating means to separately regulate flow of cleaning water to be fed to each nozzle. COPYRIGHT: (C)2006,JPO&NCIPI
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