| 摘要 |
PROBLEM TO BE SOLVED: To provide a sputtering cathode and a sputtering system capable of obtaining a space-saving, compact and inexpensive cathode structure. SOLUTION: Reduction in size and cost is realized by installing a target on both sides of one cathode while, in the conventional system, one cathode is generally used for one target material. COPYRIGHT: (C)2006,JPO&NCIPI
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