发明名称 Gradually changed film coating device and tool for using in the coating device
摘要 A coating device includes a coating material source, and at least one substrate disposed opposite to the coating material source. The substrate has a coating surface that receives coating material from the coating material source to form a film thereon. A board is disposed on the coating surface of the substrate. The height and thickness of the board and the angle between the board and the substrate determines gradually changed slope and gradually changed area of the film on the board, whereby the slope and the area can be precisely controlled during the deposition process.
申请公布号 US2006196423(A1) 申请公布日期 2006.09.07
申请号 US20050230500 申请日期 2005.09.21
申请人 ASIA OPTICAL CO., INC. 发明人 HUANG CHIEN-MING
分类号 C23C16/00;C23C14/00 主分类号 C23C16/00
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