发明名称 Methods of forming threshold voltage implant regions
摘要 The invention includes methods of forming channel region implants for two transistor devices simultaneously, in which a mask is utilized to block a larger percentage of a channel region location of one of the devices relative to the other. The invention also pertains to methods of forming capacitor structures in which a first capacitor electrode is spaced from a semiconductor substrate by a dielectric material, a second capacitor electrode comprises a conductively-doped diffusion region within the semiconductor material, and a capacitor channel region location is beneath the dielectric material and adjacent the conductively-doped diffusion region. An implant mask is formed to cover only a first portion of the capacitor channel region location and to leave a second portion of the capacitor channel region location uncovered. While the implant mask is in place, dopant is implanted into the uncovered second portion of the capacitor channel region location.
申请公布号 US2006199341(A1) 申请公布日期 2006.09.07
申请号 US20060406893 申请日期 2006.04.18
申请人 WANG HONGMEI;BEIGEL KURT D;FISHBURN FRED D;YANG RONGSHENG 发明人 WANG HONGMEI;BEIGEL KURT D.;FISHBURN FRED D.;YANG RONGSHENG
分类号 H01L21/336 主分类号 H01L21/336
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