| 发明名称 |
METHOD OF PREVENTING DAMAGE TO POROUS LOW-K MATERIALS DURING RESIST STRIPPING |
| 摘要 |
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| 申请公布号 |
EP1697984(A2) |
申请公布日期 |
2006.09.06 |
| 申请号 |
EP20040812717 |
申请日期 |
2004.12.01 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
ANNAPRAGADA, RAO;TAKESHITA, KENJI |
| 分类号 |
H01L21/4763;H01L21/302;H01L21/311;H01L21/44;H01L21/461;H01L21/768 |
主分类号 |
H01L21/4763 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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