发明名称 Integrated Absolute and Differential Pressure Transducer
摘要 A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale. To achieve the foregoing objects the method and apparatus for measuring absolute pressure in a chamber (see figure) includes determining a correlation factor between absolute and differential pressure measurements taken simultaneously at a pressure where the absolute pressure in the chamber can be measured accurately, and adjusting differential pressure measurements with the correlation factor to provide virtual absolute prenure measurements.
申请公布号 GB2423823(A) 申请公布日期 2006.09.06
申请号 GB20060010004 申请日期 2004.11.24
申请人 MKS INSTRUMENTS INC 发明人 PAUL DOZORETZ;YOUFAN GU;GARRY HOLCOMB;OLE WENZEL
分类号 G01L27/00;G01L13/00 主分类号 G01L27/00
代理机构 代理人
主权项
地址