| 摘要 |
<p>To provide a drive unit capable of providing assurances of a high-accuracy measurement operation while suppressing any posture change of a detector to possibly minimum even if the detector is moved. Included are: a cross section of horizontally-oriented-U-shape guide rail 22 provided to a frame 21, and the outside to be parallel to the movement direction of a roughness detector; a slider 24 formed to be able to freely slide along the guide rail 22, and configures a frame being rectangular in cross section to include a detector 5 therein; biasing member 31 that biases the slider 24 against the guide rail; and drive means 41 that moves the slider 24 along the guide rail 22. The drive unit is configured to include a motor 42, a ball screw axis 47 to be driven by the motor, and a nut member 48 that is screwed to the ball screw axis, and is coupled to the slider. The ball screw axis 47 is disposed in the vicinity of the substantial center of sliding surfaces of the slider 24 (four inner surfaces of the slider 24).</p> |
