发明名称 MEMS Fabry Perot Filter for Integrated Spectroscopy System
摘要 Integrated spectroscopy systems are disclosed. In some examples, integrated tunable detectors, using one or multiple Fabry-Perot tunable filters, are provided. Other examples use integrated tunable sources. The tunable source combines one or multiple diodes, such as superluminescent light emitting diodes (SLED), and a Fabry Perot tunable filter or etalon. The advantages associated with the use of the tunable etalon are that it can be small, relatively low power consumption device. For example, newer microelectrical mechanical system (MEMS) implementations of these devices make them the size of a chip. This increases their robustness and also their performance. In some examples, an isolator, amplifier, and/or reference system is further provided integrated.
申请公布号 US2006197958(A1) 申请公布日期 2006.09.07
申请号 US20060380686 申请日期 2006.04.28
申请人 AXSUN TECHNOLOGIES, INC. 发明人 ATIA WALID A.;FLANDERS DALE C.;KOTIDIS PETROS;KUZNETSOV MARK E.
分类号 G01B9/02;B81B7/02;G01J3/10;G01J3/26;G01J3/36;G01N21/25;G02B5/28;G02B26/00 主分类号 G01B9/02
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