| 摘要 |
An anisotropically conductive connector, by which expected electrical inspection can be conducted even to a circuit device having a clock frequency of, for example, at least 1 GHz, and an electrical inspection apparatus for circuit devices, which is equipped with this connector. The anisotropically conductive connector includes an elastic anisotropically conductive film having a plurality of conductive parts for connection arranged in accordance with a pattern corresponding to electrodes to be connected and extending in a thickness-wise direction of the film and an insulating part mutually insulating these conductive parts for connection, wherein conductive parts for high-frequency shielding extending in the thickness-wise direction are formed in the elastic anisotropically conductive film. The electrical inspection apparatus for circuit devices includes the above anisotropically conductive connector. |
