发明名称 EVAPORATING SOURCE ASSEMBLY AND DEPOSITION APPARATUS HAVING THE SAME
摘要 One evaporator source assembly and the evaporation coating apparatus therewith are disclosed. The evaporator source assembly has one shell with one shield part, which has a guide part with extending lines toward the same position, and evaporating sources with nozzle part, which has inclined through holes. Therefore, the evaporated and coated materials from all the evaporating sources are coated tothe same area of the coated base plate so as to form film with homogeneous roughness and homogeneous thickness.
申请公布号 KR100623730(B1) 申请公布日期 2006.09.06
申请号 KR20050018834 申请日期 2005.03.07
申请人 SAMSUNG SDI CO., LTD. 发明人 AHN, JAE HONG;LEE, SUNG HO;CHO, WON SEOK
分类号 H05B33/10 主分类号 H05B33/10
代理机构 代理人
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