发明名称 Semiconductor device
摘要 A wiring line to which a high-frequency signal is applied is electrically connected in parallel to an auxiliary wiring line via a plurality of contact holes. The contact holes are formed through an interlayer insulting film and arranged in vertical direction to the wiring line. Since the auxiliary wiring line is formed in the same layer as an electrode that constitutes a TFT, the electric resistance of the wiring line can be reduced effectively and waveform rounding of an applied high-frequency signal can be reduced without increasing the number of manufacturing steps.
申请公布号 US7102169(B2) 申请公布日期 2006.09.05
申请号 US20040803965 申请日期 2004.03.19
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 KOYAMA JUN;OHTANI HISASHI;OGATA YASUSHI;YAMAZAKI SHUNPEI
分类号 G02F1/1345;H01L29/15;G02F1/133;G02F1/136;G02F1/1362;G02F1/1368;G09F9/30;H01L21/77;H01L27/12;H01L29/04;H01L29/786 主分类号 G02F1/1345
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