发明名称 Surface acoustic wave sensing system and method for measuring pressure and temperature
摘要 A surface acoustic wave (SAW) sensor and an interrogator that transmits a noise source to the sensor for receiving an interrogation signal that is processed and compared to the source signal provides pressure and temperature measurements. One SAW sensor a single interdigital transducer serving as both an input and an output transducer for generating and detecting a SAW, and coded reflectors in a mirrored arrangement opposing the single interdigital transducer. The piezoelectric substrate is supported in a hermetically sealed package such that pressure on the package causes distortion of the substrate transducer surface and thus SAW velocity changes that reflect changes in pressure. Characteristic temperature coefficients of delay for the substrate are directly translated into a temperature value.
申请公布号 US7100451(B2) 申请公布日期 2006.09.05
申请号 US20040926851 申请日期 2004.08.26
申请人 SAWTEK, INC. 发明人 SOLIE LELAND P.
分类号 G01L11/00;G01L1/16;G01L9/00;G01L19/00 主分类号 G01L11/00
代理机构 代理人
主权项
地址