| 摘要 |
A laser beam apparatus for processing a workpiece (20), comprising an optical system consisting of optical components for guiding a laser beam emitted from a laser oscillator (1) to the workpiece (20), wherein one laser beam is split by a first polarization splitting means (5) into two laser beams, one of the beams is passed through a mirror (14) while the other is used by a first galvano scan mirror (13) for scanning in two axial directions, the two laser beams are guided to a second polarization splitting means (8) and used by a second galvano scan mirror (12) for scanning. The first and second polarization splitting means are arranged at 45° relative to the optical axis of the laser light.
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