| 摘要 |
<p>A plasma resistant member has a base material and a coating layer made of an Y<SUB>2</SUB>O<SUB>3</SUB>, the coating layer being formed on a surface of the base material. The coating layer has a thickness of 10 mum or more and the Y<SUB>2</SUB>O<SUB>3 </SUB>of the coating layer contains solid solution Si ranging from 100 ppm to 1000 ppm.</p> |
