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发明名称
Method for forming decoupling capacitors using lithographic dummy fillers
摘要
申请公布号
EP1232519(B1)
申请公布日期
2006.08.30
申请号
EP20000978366
申请日期
2000.11.02
申请人
INFINEON TECHNOLOGIES NORTH AMERICA CORP.;INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
REITH, ARMIN, M.;HSU, LOUIS;HAFFNER, HENNING;LEHMANN, GUNTHER
分类号
G06F17/50;H01L21/00;H01L21/02;H01L21/82;H01L21/822;H01L21/8242;H01L27/04;H01L27/108
主分类号
G06F17/50
代理机构
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