| 发明名称 |
CONTROL OF CARBON NANOTUBE DIAMETER USING CVD OR PECVD GROWTH |
| 摘要 |
<p>The diameter of carbon nanotubes grown by chemical vapor deposition is controlled independent of the catalyst size by controlling the residence time of reactive gases in the reactor.</p> |
| 申请公布号 |
KR20060094958(A) |
申请公布日期 |
2006.08.30 |
| 申请号 |
KR20067007179 |
申请日期 |
2006.04.14 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
GRILL ALFRED;NEUMAYER DEBORAH;SINGH DINKAR |
| 分类号 |
B82B3/00;C01B31/02;C23C16/26;C23C16/52;C30B25/00;C30B25/10;C30B29/60;D01F9/12;H01J9/02;H01L51/30;H05H1/24 |
主分类号 |
B82B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
