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发明名称
ELECTROSTATIC CHUCK AND VACUUM HANDLING APPARATUS EQUIPPED WITH THE SAME
摘要
申请公布号
KR20060094912(A)
申请公布日期
2006.08.30
申请号
KR20060018108
申请日期
2006.02.24
申请人
ULVAC, INC.
发明人
KOJI SOGABE;YASUNORI DANJO
分类号
H01L21/683
主分类号
H01L21/683
代理机构
代理人
主权项
地址
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