发明名称 |
Method for manufacturing vibrating gyrosensor |
摘要 |
A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and a vibrating element mounted on a surface of the support substrate. The vibrating element includes a base part having a mounting surface on which a plurality of terminals, and a vibrator part integrally projected in a cantilever manner from one of the sides of the base part and having a substrate-facing surface coplanar with the mounting surface of the base part. The vibrator part has a first electrode layer, a piezoelectric layer, and a second electrode layer, which are formed on the substrate-facing surface in that order. Furthermore, a reinforcing part is formed at the base end of the vibrator part so that the sectional area of the vibrator part gradually increases toward the base part. |
申请公布号 |
EP1696206(A1) |
申请公布日期 |
2006.08.30 |
申请号 |
EP20060003942 |
申请日期 |
2006.02.27 |
申请人 |
SONY CORPORATION |
发明人 |
INAGUMA, TERUO;HONDA, JUNICHI;SUZUKI, KOJI;TAKAHASHI, KAZUO;NAKASHIO, EIJI |
分类号 |
G01C19/56;G01C19/5642;G01C19/5656;G01C19/5663;G01C19/5783;H01L41/08;H01L41/187;H01L41/22;H01L41/23;H01L41/332;H01L41/335;H01L41/338 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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