APPARATUS AND METHOD FOR A MODULAR ELECTRON BEAM SYSTEM FOR THE TREATMENT OF SURFACES,申请号EP19980914685-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR A MODULAR ELECTRON BEAM SYSTEM FOR THE TREATMENT OF SURFACES
摘要
申请公布号	EP0978137(A4)	申请公布日期	2006.08.30
申请号	EP19980914685	申请日期	1998.04.10
申请人	USHIO INCORPORATED	发明人	WAKALOPULOS, GEORGE
分类号	H01J37/06;B29C35/08;B29C71/04;G21K5/04;H01J5/18;H01J33/00;H01J33/04;H01J37/065;H01J37/30;(IPC1-7):H01J37/06	主分类号	H01J37/06
代理机构		代理人
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