发明名称 |
Micro corner cube array, method of making the micro corner cube array, and display device |
摘要 |
A method of making a micro corner cube array includes the steps of: providing a substrate, at least a surface portion of which consists of cubic single crystals and which has a surface that is substantially parallel to {111} planes of the crystals; and dry-etching the surface of the substrate anisotropically with an etching gas that is reactive with the substrate, thereby forming a plurality of unit elements of the micro corner cube array on the surface of the substrate. Each of the unit elements is made up of a number of crystal planes that have been etched at a lower etch rate than the {111} planes of the crystals.
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申请公布号 |
US7098137(B2) |
申请公布日期 |
2006.08.29 |
申请号 |
US20020315192 |
申请日期 |
2002.12.10 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
IHARA ICHIRO;MINOURA KIYOSHI;SAWAYAMA YUTAKA |
分类号 |
G02B5/124;H01L21/302;C09K13/00;F21V8/00;G02B5/04;G02F1/1335;H01L21/00;H01L21/306;H01L21/3065;H01L21/461 |
主分类号 |
G02B5/124 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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