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发明名称
SPRAY-TYPE SUBSTRATE TREATING APPARATUS
摘要
申请公布号
KR20060094213(A)
申请公布日期
2006.08.29
申请号
KR20050015195
申请日期
2005.02.24
申请人
DAEWOO ELECTRONICS CORPORATION
发明人
YOUN, SUK WON
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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