发明名称 Oscillation method and device of fluorine molecular laser
摘要 An oscillation method and a device of fluorine molecular laser with narrow spectral line width are provided. For this purpose, the device includes main electrodes ( 14, 15 ) for performing main discharge ( 50 ) in substantially a same direction as an optical axis of laser light ( 11 ) to be oscillated to excite a laser gas containing fluorine, an insulator ( 12 ) which is held between the main electrodes and into which the laser gas containing fluorine is injected, and resonators ( 16, 18 ) which are placed with the insulator between them, and a space (M(lambda)) of a vertical mode expressed in wavelength is made larger than full width at half maximum (Deltalambda) of a gain curve (R) of the laser gas.
申请公布号 US7099365(B2) 申请公布日期 2006.08.29
申请号 US20020281985 申请日期 2002.10.29
申请人 KOMATSU, LTD. 发明人 TAKEHISA KIWAMU;GOTO TATSUMI
分类号 G03F7/20;H01S3/22;H01L21/027;H01S3/03;H01S3/038;H01S3/05;H01S3/08;H01S3/097;H01S3/223;H01S3/225 主分类号 G03F7/20
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