摘要 |
Atomic layers can be formed by introducing a tantalum amine derivative reactant onto a substrate, wherein the tantalum amine derivative has a formula: Ta(NR<SUB>1</SUB>)(NR<SUB>2</SUB>R<SUB>3</SUB>)<SUB>3</SUB>, wherein R<SUB>1</SUB>, R<SUB>2 </SUB>and R<SUB>3 </SUB>are each independently H or a C<SUB>1</SUB>-C<SUB>6 </SUB>alkyl functional group, chemisorbing a portion of the reactant on the substrate, removing non-chemisorbed reactant from the substrate and introducing a reacting gas onto the substrate to form a solid material on the substrate. Thin films comprising tantalum nitride (TaN) are also provided.
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