Cantilever having piezoelectric actuator and tip with high aspect ratio and method for manufacturing the same,申请号KR20040059291-传众专利搜索

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发明名称	Cantilever having piezoelectric actuator and tip with high aspect ratio and method for manufacturing the same
摘要
申请公布号	KR100617471(B1)	申请公布日期	2006.08.29
申请号	KR20040059291	申请日期	2004.07.28
申请人		发明人
分类号	H01J37/28	主分类号	H01J37/28
代理机构		代理人
主权项
地址

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