| 摘要 |
FIELD: measuring equipment engineering, namely, methods for measuring by means of scanning probing relief microscope, linear dimensions and physical characteristics of surface of objects in modes of scanning tunnel microscope, atomic-force microscope, close-polar optical microscope and others. ^ SUBSTANCE: object is mounted on first piezo-scanner. Above surface of object being studied, second piezo-scanner is positioned with probe. Using mutual movement of both piezo-scanners, scanning is performed. Both piezo-scanners are connected in counter-phase by each one of scanning coordinates. Two piezo-scanners are utilized with equivalent active elements. Position of one of piezo-scanners is measured by each one of scanning coordinates. Values of movements are determined on basis of results of measurements. Scanning is performed by rotating the probe and sample around appropriate fixed centers. ^ EFFECT: increased resolution of scanning method, method makes it possible to disable at least one of coordinates on one of scanners. ^ 3 cl, 4 dwg |
