METHODS OF FORMING A TITANIUM NITRIDE LAYER HAVING A SMOOTH SURFACE AND METHODS OF FORMING A SEMICONDUCTOR DEVICE USING THE SAME,申请号KR20040073984-传众专利搜索

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发明名称	METHODS OF FORMING A TITANIUM NITRIDE LAYER HAVING A SMOOTH SURFACE AND METHODS OF FORMING A SEMICONDUCTOR DEVICE USING THE SAME
摘要
申请公布号	KR100615602(B1)	申请公布日期	2006.08.25
申请号	KR20040073984	申请日期	2004.09.15
申请人		发明人
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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