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发明名称
HEATER UNIT AND METHOD OF MANUFACTURING THE SAME
摘要
申请公布号
KR100615737(B1)
申请公布日期
2006.08.25
申请号
KR20040009682
申请日期
2004.02.13
申请人
发明人
分类号
H05B3/20;H01L21/205;H01L21/3065
主分类号
H05B3/20
代理机构
代理人
主权项
地址
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