| 摘要 |
PROBLEM TO BE SOLVED: To improve productivity in manufacture of a light-emitting element by which a sheet-like mask can be easily flattened and a film-formation working time can be reduced, and which has a film-formation process. SOLUTION: The mask 1 for film formation is provided with a mask sheet 2 and a support member 3. The mask sheet 2 has an opening pattern forming region 2A to which an opening pattern is formed corresponding to a film-forming region of a film-formed target, and is formed of a magnetic body. The support member 3 has an opening 3A corresponding to the opening pattern forming region 2A of the mask sheet 2, and also, has a magnetized flat face 3B for flattening the mask sheet 2 by attracting it. COPYRIGHT: (C)2006,JPO&NCIPI
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