发明名称 |
PROBABILITY OF FAULT FUNCTION DETERMINATION USING CRITICAL DEFECT SIZE MAP |
摘要 |
Methods, systems and program products for determining a probability of fault (POF) function using critical defect size maps. Methods for an exact or a sample POF function are provided. Critical area determinations can also be supplied based on the exact or sample POF functions. The invention provides a less computationally complex and storage-intensive methodology.
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申请公布号 |
US2006190222(A1) |
申请公布日期 |
2006.08.24 |
申请号 |
US20050906548 |
申请日期 |
2005.02.24 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
ALLEN ROBERT J.;TAN MERVYN Y. |
分类号 |
G06F17/10;G06F17/50 |
主分类号 |
G06F17/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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