摘要 |
A non-volatile memory device includes a substrate that is divided into a field region and an active region by isolation layer patterns. The active region has an active trench for increasing an effective area of the active region. A tunnel oxide layer is formed on the active region. A floating gate pattern is formed on the tunnel oxide layer to fill up the active trench. A dielectric layer pattern is formed on the floating gate pattern. A control gate pattern is formed on the dielectric layer pattern. Thus, the non-volatile memory device has an increased effective area of the active region so that the non-volatile memory device may have improved operational characteristics.
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