发明名称 Gate structure of a non-volatile memory device and method of manufacturing same
摘要 A non-volatile memory device includes a substrate that is divided into a field region and an active region by isolation layer patterns. The active region has an active trench for increasing an effective area of the active region. A tunnel oxide layer is formed on the active region. A floating gate pattern is formed on the tunnel oxide layer to fill up the active trench. A dielectric layer pattern is formed on the floating gate pattern. A control gate pattern is formed on the dielectric layer pattern. Thus, the non-volatile memory device has an increased effective area of the active region so that the non-volatile memory device may have improved operational characteristics.
申请公布号 US2006187711(A1) 申请公布日期 2006.08.24
申请号 US20050321645 申请日期 2005.12.28
申请人 JANG DAE-HYUN 发明人 JANG DAE-HYUN
分类号 G11C11/34;G11C16/04 主分类号 G11C11/34
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