| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve highly accurate image exposure by uniformizing a light quantity in each of two-dimensionally distributed drawing units while suppressing the cost for the device. <P>SOLUTION: A coating layer 121 to decrease transmittance for laser light transmitting a condenser lens 120 is provided to the center part around the optical axis L on the light exiting surface 120A of the condenser lens 120 which is placed on the optical path in the beam incident side of a spatial optical modulator so as to perform correction to uniformize the light quantity distribution by decreasing the light quantity (intensity) of the laser light in the center part around the optical axis. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
