| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection method capable of easily detecting fixed pattern noise of a solid-state imaging device. <P>SOLUTION: The inspection method acquires an image signal generated by the solid-state imaging device through emission of an illumination light for inspection to respectively generate a plurality of partial images with respect to a whole image indicated by the image signal by the same image size. Then the inspection method applies processing such as inversion or rotation to the partial images so as to unchange the image size and thereafter applies processing such as averaging to the partial images to produce a reference image, and respectively generates inspection images equivalent to differences between the reference image and the plurality of partial images. Assuming that there exists no fixed pattern noise at all, the reference image is a uniform image and all the inspection images have uniformly a black level. That is, normal pixels reach a black level in the inspection images, and the signal level is greatly different from those of the noise parts. Thus, the fixed pattern noise can easily be detected by using the inspection images. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
