摘要 |
<P>PROBLEM TO BE SOLVED: To provide a ceramic heater capable of preventing interface peel-off, and its manufacturing method, a gas sensor using the same and its manufacturing method. <P>SOLUTION: Provided is a method of manufacturing the ceramic heater 1 to be incorporated in the gas sensor for detecting specific gas density in exhaust gas. Platinum paste is coated on the surface of a ceramic heater base material 2 to form a heater pattern 3. Next, ceramic paste is coated on the surface of the heater base material 2 so as to cover the heater pattern 3 to form an insulating layer 4. Thereafter, the heater base material 2 forming the heater pattern 3 and the insulating layer 4 is calcined. A difference in maximum burning shrinkage ratios of the heater base material 2, the heater pattern 3, and the insulating layer 4 at calcining is within 5% or less of each other. <P>COPYRIGHT: (C)2006,JPO&NCIPI |