| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus which can stably control the temperature of an object. SOLUTION: The heat treatment apparatus is provided with a housing 100 which holds the object 1 to be heat-treated, and an upper heater 7 and a lower heater 8 arranged above and below the object, respectively, each surrounding the circumference of the housing. The vertical distance from the lowest part a of the upper heater to the topmost part b of the object and the vertical distance from the topmost part d of the lower heater to the lowest part c of the object are respectively set to be equal to or larger than the internal radius of the housing. COPYRIGHT: (C)2006,JPO&NCIPI
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