| 摘要 |
PROBLEM TO BE SOLVED: To provide a diaphragm-type pressure sensor, having little influence on the environmental temperature variation, capable of measuring pressure more accurately. SOLUTION: The partition-type pressure sensor comprises a first insulative substrate, a conductive substrate provided with a diaphragm and a second insulative substrate provided with a ventilation hole, among the diaphragm, the first insulating substrate and the ventilation hole the pressure reference room and the pressure measuring chamber are formed respectively, and the displacement of the diaphragm, corresponding to the pressure applied on the pressure measuring chamber through the ventilation hole from outside is measured. At least on either of the first insulative substrate or the second insulative substrate a plate, with a smaller temperature expansion coefficient than the insulating substrate to be stuck, is stuck. COPYRIGHT: (C)2006,JPO&NCIPI
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