| 摘要 |
PROBLEM TO BE SOLVED: To provide an ion generating element having a discharge electrode and a dielectric electrode arranged on an identical plane capable of obtaining larger ion effect, without enlarging an area of an ion generating electrode part. SOLUTION: The discharge electrode 2 and the dielectric electrode 3 constituting an ion generating electrode are arranged on an identical plane, and concave parts 8 are formed on the dielectric electrode 3. Needle-shaped electrode parts 2a of the discharge electrode 2 are made to get into the concave parts 8 and the discharge electrode 2 and the dielectric electrode 3 are covered by an insulation body 4. By the above, a larger ion effect is obtained without enlarging the area of the ion generating electrode part. A minute inter-electrode gap is formed between the discharge electrode 2 and the dielectric electrode 3 by forming a pattern through etching of a conductor, after forming the conductor made of a gold film on a substrate 1 made of an alumina sintered compact. Further, dielectric strength is improved by using crystallized glass as the insulation body 4. COPYRIGHT: (C)2006,JPO&NCIPI
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